InSb Nanowire Field-Effect Transistors and Quantum-Dot Devices
Author
Summary, in English
The authors present fabrication and electrical measurements of InSb nanowire field-effect transistors (FETs) and quantum dots. The devices are made on a SiO2-capped Si substrate from InSb segments of InAs/InSb heterostructured nanowires, which are grown by metalorganic vapor phase epitaxy. For the FETs, both single- and dual-gate devices are fabricated. The Si substrate is employed as the back gate in both the single-and dual-gate devices, while a top metal gate is employed as a second gate in the dual-gate devices. This top gate is made either as a global gate or as a local finger gate by using a thin HfO2 layer grown by atomic layer deposition as a gate dielectric. The measurements reveal that the fabricated devices show the desired transistor characteristics. The measurements also demonstrate the possibility of realizing ambipolar transistors using InSb nanowires. For InSb nanowire quantum dots, both contact-induced Schottky-barrier-defined devices and top-finger-gate-defined devices are fabricated, and the Si substrate is used as a gate to tune the electron number in the quantum dots. The electrical measurements of these fabricated quantum-dot devices show the Coulomb-blockade effect at 4.2 K. A Fabry-Perot-like interference effect is also observed in a Schottky-barrier-defined quantum device. The authors also discuss in a comparative way, the results of measurements for the InSb nanowire devices made by different fabrication technologies employed in this study.
Department/s
Publishing year
2011
Language
English
Pages
907-914
Publication/Series
IEEE Journal of Selected Topics in Quantum Electronics
Volume
17
Issue
4
Document type
Journal article
Publisher
IEEE - Institute of Electrical and Electronics Engineers Inc.
Topic
- Condensed Matter Physics
- Electrical Engineering, Electronic Engineering, Information Engineering
Keywords
- Field-effect transistors (FETs)
- indium compounds
- quantum dots
- semiconductor growth
- single-electron transistors
Status
Published
Research group
- Nano
ISBN/ISSN/Other
- ISSN: 1077-260X