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SU8 cantilevers for sensing applications in liquid and gaseous environments

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Author

  • Maria Tenje
  • S. Keller
  • S. Dohn
  • A. Boisen

Publishing year

2009

Language

English

Document type

Conference paper: abstract

Topic

  • Medical Engineering

Conference name

11th International Scanning Probe Microscopy Conference (ISPM 2009)

Conference date

2009-06-17 - 2009-06-19

Conference place

Madrid, Spain

Status

Published