Drift study of SU8 cantilevers in liquid and gaseous environments
Author
Summary, in English
We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.
Publishing year
2010
Language
English
Pages
596-598
Publication/Series
Ultramicroscopy
Volume
110
Issue
6
Document type
Journal article
Publisher
Elsevier
Topic
- Medical Engineering
Status
Published
ISBN/ISSN/Other
- ISSN: 0304-3991