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Design and Modeling of a High-Speed AFM-Scanner

På svenska

Author

  • Georg Schitter
  • Karl Johan Åström
  • Barry E. DeMartini
  • Philipp J. Thurner
  • Kimberly L. Turner
  • Paul K. Hansma

Summary, in English

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.

Publishing year

2007

Language

English

Pages

906-915

Publication/Series

IEEE Transactions on Control Systems Technology

Volume

15

Issue

5

Document type

Journal article

Publisher

IEEE - Institute of Electrical and Electronics Engineers Inc.

Topic

  • Control Engineering

Keywords

  • Atomic force microscopy
  • fast scanning
  • mechatronics
  • nanotechnology
  • precision positioning
  • real time imaging

Status

Published

ISBN/ISSN/Other

  • ISSN: 1558-0865