A new multifunctional platform based on high-aspect ratio interdigitated NEMS structures
Author
Summary, in English
A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.
Department/s
Publishing year
2009
Language
English
Publication/Series
Nanotechnology
Volume
20
Issue
17
Document type
Journal article
Publisher
IOP Publishing
Topic
- Nano Technology
Keywords
- CANTILEVER SENSORS NANOSENSORS LITHOGRAPHY BEAM
Status
Published
Research group
- Neuronano Research Center (NRC)
ISBN/ISSN/Other
- ISSN: 0957-4484