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A compact CMOS MEMS microphone with 66dB SNR

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Author

  • Jelena Citakovic
  • Per F. Høvesten
  • Gino Rocca
  • Aart van Halteren
  • Pirmin Rombach
  • Lars J. Stenberg
  • Pietro Andreani
  • Erik Bruun

Summary, in English

A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.

Publishing year

2009

Language

English

Pages

350-351

Publication/Series

[Host publication title missing]

Volume

52

Document type

Conference paper

Topic

  • Electrical Engineering, Electronic Engineering, Information Engineering

Keywords

  • integrated
  • microphone
  • CMOS
  • MEMS

Conference name

IEEE International Solid-State Circuits Conference (ISSCC), 2009

Conference date

2009-02-08 - 2009-02-12

Conference place

San Francisco, United States

Status

Published

Research group

  • Data converters & RF

ISBN/ISSN/Other

  • ISSN: 0193-6530