Accumulation capacitance of narrow band gap metal-oxide-semiconductor capacitors
Author
Summary, in English
We have investigated the accumulation capacitance-voltage characteristics for capacitors with narrow band gap materials using modeling and experiments. The capacitance for InAs and In0.53Ga0.47As capacitors with a HfO2 oxide layer has been calculated using atomistic tight-binding, effective mass, and semiclassical nonparabolic models. The simulations show that band structure effects have a strong influence on the accumulation capacitance, and are essential for the description of narrow band gap capacitors. The calculated tight binding data compare well with measurements on n-type InAs HfO2 capacitors on (100) and (111) B substrates, highlighting the nonparabolicity as the main origin for the large accumulation capacitance. (C) 2010 American Institute of Physics. [doi:10.1063/1.3449559]
Department/s
Publishing year
2010
Language
English
Publication/Series
Applied Physics Letters
Volume
96
Issue
23
Document type
Journal article
Publisher
American Institute of Physics (AIP)
Topic
- Condensed Matter Physics
- Electrical Engineering, Electronic Engineering, Information Engineering
Status
Published
Research group
- Nano
ISBN/ISSN/Other
- ISSN: 0003-6951