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Toroidal inductors in CMOS processes

Author

  • Luca Vandi
  • Pietro Andreani
  • Enrico Temporiti
  • Enrico Sacchi
  • Ivan Bietti
  • Cesare Ghezzi
  • Rinaldo Castello

Summary, in English

This paper presents a toroidal inductor integrated in a standard 0.13 /spl mu/m CMOS process. A very simple /spl Pi/ model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.

Topic

  • Electrical Engineering, Electronic Engineering, Information Engineering

Status

Published

ISBN/ISSN/Other

  • ISBN: 1-4244-0064-3