Toroidal inductors in CMOS processes
Author
Summary, in English
This paper presents a toroidal inductor integrated in a standard 0.13 /spl mu/m CMOS process. A very simple /spl Pi/ model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.
Publishing year
2005
Language
English
Pages
293-296
Publication/Series
23rd NORCHIP Conference, 2005.
Links
Document type
Conference paper
Topic
- Electrical Engineering, Electronic Engineering, Information Engineering
Status
Published
ISBN/ISSN/Other
- ISBN: 1-4244-0064-3