Physics: Processing and Device Technology
The purpose of this course is to provide fundamental knowledge about fabrication and characterization of semiconductor devices on the nanometer scale. The focus is set on modern materials and processing techniques with nanotechnology as a main theme. Most of the processes are general and are applied in traditional Si based IC technology as well as in advanced III-V technology and MEMS/NEMS fabrication.
Knowledge and understanding
For a passing grade the student must
- be able to describe fabrication processes based on diffusion, deposition, and surface patterning
- be able to explain how the above mentioned processes can be realized on the nanometer scale
- be able to explain the relation between possibilities and limitations in processing and device performance
Competences and skills
For a passing grade the student must
- be able to execute basic processing in a clean room
- be able to analyze a specific device and decide which process steps that are needed for its fabrication
- write well structured technical reports about semiconductor device processing
Materials properties of semiconductors. Device fabrication: process overview, comparison between III/V and Si. Processes: Epitaxy, doping, ion implantation, diffusion, etching, lithography. Recent methods as e.g. surface functionalization and nanoimprint lithography will also be treated. Metal-semiconductor interfaces, which are of significant importance in a number of applications will be covered. Fabrication and applications of p-n junction diodes and characterization and modeling of their electronic and optoelectronic properties. Fabrication and principles for MEMS/NEMS (micro/nano-electromechanical systems) will also be treated. In a number of laboratory exercises, some of the covered process steps will be applied in order to make working devices. Since it is highly important that semiconductor processing is carried out in a clean and dust free environment, strong emphasis will be put on clean room work methods. Finally, some advanced semiconductor structures and their properties will be demonstrated.
course homepage: http://www.nano.lu.se/ftf-cth/fff11
More information can be found at http://liveatlund.lu.se/departments/physics-N/FYSD13/Pages/default.aspx
mathieu [dot] gisselbrecht [at] sljus [dot] lu [dot] se
General and Physics 3: Modern Physics (FYSA31), or similar
Seats are allocated according to: The general average (GPA) of your higher secondary school leaving certificate: 20 %, The Swedish national university aptitude test: 10 %, Previous college/university studies (APGR): 70 %.
English language requirements
Most of Lund University’s programmes require English Level 6 (unless otherwise stated under 'Entry requirements'). This is the equivalent of an overall IELTS score of 6.5 or a TOEFL score of 90. There are several ways to prove your English language proficiency – check which proof is accepted at the University Admissions in Sweden website. All students must prove they meet English language requirements by the deadline, in order to be considered for admission.
How to apply
Lund University uses a national application system run by University Admissions in Sweden. It is only possible to apply during the application periods.
Step 1: Apply online
- Check you meet the entry requirements of the programme or course you are interested in
- Start your application – go to www.universityadmissions.se where you create an account and select programmes/courses, during the application period
- Rank your programme/course choices in order of preference and submit them before the application deadline
Step 2: Submit documents
- Read about how to document your eligibility and how to submit your documents at www.universityadmissions.se. Follow any country-specific document rules for Master's studies or Bachelor's studies
- Get all your documents ready: official transcripts and high school diploma (Bachelor's applicants), official transcripts and degree certificate or proof of expected graduation (Master's applicants), passport/ID and proof of English proficiency (all applicants)
- Prepare programme-specific documents if stated on this page
- Upload or send all required documents to University Admissions before the document deadline
- Pay the application fee (if applicable) before the document deadline
*Note that the process if different if you are applying as an exchange student or as a part of a cooperation programme (such as Erasmus +).
*If you have studied your entire Bachelor's programme in Sweden and all of your academic credits are in Ladok, you do not have to submit transcripts or your diploma when applying for a Master's programme.
*Svensk student? Läs instruktionerna om att söka till ett internationellt masterprogram på lu.se.
Full programme/course tuition fee: SEK 18 125
First payment: SEK 18 125
Citizens of a country outside of the European Union (EU), the European Economic Area (EEA) and Switzerland are required to pay tuition fees. You pay one instalment of the tuition fee in advance of each semester.
EU/EEA citizens and Switzerland
There are no tuition fees for citizens of the European Union (EU), the European Economic Area (EEA) and Switzerland.
If you are required to pay tuition fees, you are generally also required to pay an application fee of SEK 900 (approximately EUR 100) when you apply at www.universityadmissions.se. You pay one application fee regardless of how many programmes or courses you apply to.
*Note that there are no tuition or application fees for exchange students or PhD students, regardless of their nationality.
Lund University Global Scholarship programme
The Lund University Global Scholarship programme is a merit-based and selective scholarship targeted at top academic students from countries outside the EU/EEA.
Swedish Institute Scholarships
The Swedish Institute offers scholarships to international students applying for studies in Sweden at Bachelor's, Master's, PhD and post-doctoral levels.
Country-specific scholarships and funding options
Lund University has agreements with scholarship organisations and funding bodies in different countries, which may allow applicants to apply for funding or scholarships in their home countries for their studies at Lund University.
- Scholarships/funding for students from Brazil, Indonesia, Mexico, Colombia, Russia and Chile
- US student finance
- Canada and UK student finance