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A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

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Author

  • Maria Tenje
  • Montserrat Calleja
  • Jörg Hübner
  • Anja Boisen

Summary, in English

We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.

Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

Publishing year

2008

Language

English

Publication/Series

Journal of Micromechanics and Microengineering

Volume

18

Issue

1

Document type

Journal article

Publisher

IOP Publishing

Topic

  • Medical Engineering

Status

Published

ISBN/ISSN/Other

  • ISSN: 0960-1317