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SU-8 Cantilever for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Author

  • Maria Nordström
  • Stephan Keller
  • Michael Lillemose
  • Alicia Johansson
  • Søren Dohn
  • Daniel Haefliger
  • Gabriela Blagoi
  • Mogens Havsteen-Jakobsen
  • Anja Boisen

Summary, in English

Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young’s modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity tochanges in the environmental temperature and pH of the buffer solution. Moreover, weshow that the SU-8 cantilever surface can be functionalised directly with receptormolecules for analyte detection, thereby avoiding gold-thiol chemistry.

Publishing year

2008

Language

English

Pages

1595-1612

Publication/Series

Sensors

Volume

8

Issue

3

Document type

Journal article review

Publisher

MDPI AG

Topic

  • Medical Engineering

Status

Published

ISBN/ISSN/Other

  • ISSN: 1424-8220