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Cantilever-based sensor with integrated optical read-out using single mode waveguides

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Author

  • Maria Tenje
  • D.A. Zauner
  • M. Calleja
  • J. Hübner
  • Anja Boisen

Summary, in English

This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication of the system and characterisation of the read-out method.

Publishing year

2007

Language

English

Pages

497-499

Document type

Conference paper

Topic

  • Medical Engineering

Conference name

11th International Conference on Miniaturised Systems for Chemistry and Life Sciences (µTAS 2007)

Conference date

2007-10-07 - 2007-10-11

Conference place

Paris, France

Status

Published