MOVPE-grownInAs/AlAs0.16Sb0.84/InAs and InAs/AlAs0.16Sb0.84/GaSb heterostructures
Author
Summary, in English
We demonstrate MOVPE-growth of InAs/AlAs0.16Sb0.84/GaSb and InAs/AlAs0.16Sb0.84/InAs heterostructures of excellent quality as observed by transmission electron microscopy and x-ray diffraction 2-theta-omega and rocking curve scans with full width at half maximum routinely below 100 arcsec. Key points regarding interface control for heteroepitaxial nucleation are reviewed and the choice of suitable precursors to minimize the incorporation of C and O are discussed.
Publishing year
2013
Language
English
Pages
43-48
Publication/Series
Journal of Crystal Growth
Volume
374
Full text
Links
Document type
Journal article
Publisher
Elsevier
Topic
- Condensed Matter Physics
Keywords
- A1. Crystal structure
- A3. Metalorganic chemical vapor deposition
- A3. Organometallic vapor phase epitaxy
- B1. Nanomaterials
- B1. Antimonides
- B3. Heterojunction semiconductor devices.
Status
Published
ISBN/ISSN/Other
- ISSN: 0022-0248