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High rate direct current reactive sputter deposition of Al2O3 - Required process parameters

På svenska

Author

  • Karol Macak
  • Maryam Olsson
  • Ulf Helmersson

Publishing year

1997

Language

English

Pages

176-176

Publication/Series

CIP'97 proceedings : 11th International colloquium on plasma processes, May 25-29, 1997

Document type

Conference paper

Publisher

Société française du vide

Topic

  • Social Sciences Interdisciplinary
  • Other Engineering and Technologies not elsewhere specified

Conference name

11th International colloquium on plasma processes

Conference date

1997-05-25 - 1997-05-29

Conference place

Le Mans, France

Status

Published