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Thin Film Deposited from rotary ITO targets

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Author

  • Maryam Olsson

Publishing year

2008

Language

English

Publication/Series

Proceedings of the 51th Annual Technical Conference of the Society of Vacuum Coaters

Document type

Conference paper

Publisher

Society of Vacuum Coaters

Topic

  • Other Engineering and Technologies not elsewhere specified
  • Social Sciences Interdisciplinary

Conference name

51th Annual Technical Conference of the Society of Vacuum Coaters

Conference date

2008-04-19 - 2008-04-24

Status

Published