3-D Integrated Track-and-Hold Circuit Using InAs Nanowire MOSFETs and Capacitors
Author
Summary, in English
This letter presents a vertical integration scheme where track-and-hold circuits, consisting of a MOSFET in series with a metal-insulator-metal (MIM) capacitor, are successfully fabricated along vertical InAs nanowires. The nanowire MOSFET is used as a switch with varying switch resistance, Rsw, as the gate-source voltage, VGS, is varied. The track-and-hold circuit operation is verified by a sine wave that is properly evaluated by the circuit. In addition, calculations show that the three-dimensional integration reduces the track-and-hold area a factor of 2, as compared with planar MIM capacitor only. With further nanowire pitch reduction, about ten times area saving is projected.
Publishing year
2016-07-01
Language
English
Pages
851-854
Publication/Series
IEEE Electron Device Letters
Volume
37
Issue
7
Document type
Journal article
Publisher
IEEE - Institute of Electrical and Electronics Engineers Inc.
Topic
- Electrical Engineering, Electronic Engineering, Information Engineering
Keywords
- capacitor
- InAs
- mixed-signal application
- MOSFET
- Nanowire
- track-and-hold circuit
Status
Published
ISBN/ISSN/Other
- ISSN: 0741-3106