Design and Modeling of a High-Speed Scanner for Atomic Force Microscopy
Author
Department/s
Publishing year
2006
Language
English
Pages
502-507
Publication/Series
American Control Conference, 2006
Document type
Conference paper
Topic
- Control Engineering
Conference name
American Control Conference, 2006
Conference date
2006-06-14 - 2006-06-16
Conference place
Minneapolis, Minnesota, United States
Status
Published