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High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3

På svenska

Author

  • Maryam Olsson
  • Andres Azens
  • Lisen Kullman
  • Claes Göran Granqvist

Summary, in English

Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.

Publishing year

1997

Language

English

Pages

117-121

Publication/Series

Thin Solid Films

Volume

295

Issue

1-2

Document type

Journal article

Publisher

Elsevier

Topic

  • Other Engineering and Technologies not elsewhere specified
  • Social Sciences Interdisciplinary

Keywords

  • Molybdenum oxide
  • Optical properties
  • Sputtering

Status

Published

ISBN/ISSN/Other

  • ISSN: 0040-6090