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High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

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Author

  • Maryam Olsson
  • Lisen Kullman
  • Claes Göran Granqvist

Summary, in English

Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.

Publishing year

1998

Language

English

Pages

349-356

Publication/Series

Solar Energy Materials and Solar Cells

Volume

53

Issue

3-4

Document type

Journal article

Publisher

Elsevier

Topic

  • Social Sciences Interdisciplinary
  • Other Engineering and Technologies not elsewhere specified

Keywords

  • Thin films
  • Sputter deposition
  • Molybdenum oxide
  • Smart windows

Status

Published

ISBN/ISSN/Other

  • ISSN: 0927-0248