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Formation of Sm silicides on Si(111) : composition and epitaxy

Author

Summary, in English

The formation of Sm silicides on Si(111) by means of solid phase epitaxy has been studied with low energy electron diffraction, Auger electron spectroscopy and photoelectron spectroscopy of the Sm 4f level and Si 2p level. A limited reaction is found to occur already at room temperature whereas at higher temperatures a strongly intermixed Sm/Si layer showing some long range order is formed. The Sm atoms of this intermixed phase are found to be completely trivalent in accordance with expectations. The intermixed layer consists of two silicides with different compositions, one of them being SmSi2-x, the other being tentatively ascribed to SmSi.

Publishing year

1993-08-20

Language

English

Pages

254-259

Publication/Series

Surface Science

Volume

293

Issue

3

Document type

Journal article

Publisher

Elsevier

Status

Published

ISBN/ISSN/Other

  • ISSN: 0039-6028