Enhanced sputtering and incorporation of Mn in implanted GaAs and ZnO nanowires
Author
Summary, in English
We simulated and experimentally investigated the sputter yield of ZnO and GaAs nanowires, which were implanted with energetic Mn ions at room temperature. The resulting thinning of the nanowires and the dopant concentration with increasing Mn ion fluency were measured by accurate scanning electron microscopy (SEM) and nano-x-Ray Fluorescence (nanoXRF) quantification, respectively. We observed a clearly enhanced sputter yield for the irradiated nanowires compared to bulk, which is also corroborated by iradina simulations. These show a maximum if the ion range matches the nanowire diameter. As a consequence of the erosion thinning of the nanowire, the incorporation of the Mn dopants is also enhanced and increases non-linearly with increasing ion fluency.
Publishing year
2014
Language
English
Publication/Series
Journal of Physics D: Applied Physics
Volume
47
Issue
39
Document type
Journal article
Publisher
IOP Publishing
Topic
- Chemical Sciences
- Condensed Matter Physics
Keywords
- ion beam
- sputter yield
- nanowires
- x-ray fluorescence
- GaAs
- ZnO
- monte
- carlo simulation
Status
Published
ISBN/ISSN/Other
- ISSN: 1361-6463