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Development of a microtomography system at the Lund sub-micron beamline

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Author

Summary, in English

A system for ion beam tomography has been implemented in conjunction with the new sub-micron bearriline at the Lund Nuclear Microprobe laboratory. The first version of the system is dedicated to STIM (scanning transmission ion microscopy) tomography for three-dimensional mass density analysis, but future development will allow also PIXE (particle induced X-ray emission) tomography for elemental analysis of micrometer-sized samples. The PIXE tomography will gain from the 8-element large area HPGe X-ray detector (100 mm(2) for each element) at the low beam currents inherited with a sub-micrometer beam spot size. In this work, the first results are presented together with a detailed description of the developed system, including computer control of the sample rotation. The reconstruction technique, as well as potential tomography applications is briefly discussed.

Department/s

Publishing year

2006

Language

English

Pages

756-759

Publication/Series

Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Volume

249

Issue

1-2

Document type

Journal article

Publisher

Elsevier

Topic

  • Subatomic Physics

Keywords

  • tomography
  • filtered backprojection
  • nuclear microprobe
  • STIM

Status

Published

Research group

  • Nuclear Microprobe

ISBN/ISSN/Other

  • ISSN: 0168-583X