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Characterisation of SU-8 as a platform for cantilever sensors

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Author

  • Maria Tenje
  • M. Calleja
  • A. Boisen

Publishing year

2006

Language

English

Pages

76-77

Document type

Conference paper

Topic

  • Medical Engineering

Conference name

1st International workshop on nanomechanical sensors

Conference date

2006-05-08 - 2006-05-12

Conference place

Copenhagen, Denmark

Status

Published