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Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au

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Author

  • Maria Tenje
  • A. Johansson
  • E. Sánchez-Noguerón
  • B. Clausen
  • M. Calleja
  • A. Boisen

Publishing year

2004

Language

English

Pages

214-215

Document type

Conference paper

Topic

  • Medical Engineering

Conference name

30th International conference on Micro and Nano Engineering (MNE 2004)

Conference date

2004-09-19 - 2004-09-22

Conference place

Netherlands

Status

Published