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Electron microscopy study of single crystal BaZr0.9Y0.1O3-x films prepared by chemical solution deposition

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Author

Summary, in English

Single crystal thin films of 10% yttrium doped barium zirconate (BZY10) have been prepared using chemical solution deposition on magnesium oxide substrates and annealed at 800 or 1000 degrees C. A focused ion beam lift out technique was used to prepare thin (< 100 nm) specimens for transmission electron microscopy (TEM) analysis. A variety of TEM based techniques were used for characterization, including high resolution imaging, X-ray energy dispersive spectroscopy and energy filtered TEM. High resolution TEM imaging indicated a high quality single crystal film with an epitaxial cube on cube type interface between BZY10 and MgO. For the sample annealed 1000 degrees C, annular dark field imaging in scanning transmission electron microscopy (STEM) mode showed a layered pattern of lower intensity in the single crystal film. Energy filtered TEM thickness map together with scanning electron microscopy (SEM) indicate the pattern consists of partially repeating voids.

Publishing year

2012

Language

English

Pages

121-127

Publication/Series

ECS Transactions

Volume

45

Issue

1

Document type

Conference paper

Publisher

Electrochemical Society

Topic

  • Chemical Sciences

Conference name

Symposium on Ionic and Mixed Conducting Ceramics 8

Conference date

2012-05-06 - 2012-05-10

Status

Published

ISBN/ISSN/Other

  • ISSN: 1938-5862
  • ISSN: 1938-6737