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High rate magnetron sputter deposition of thin Al oxide and Mo oxide films

Author

  • Maryam Olsson

Summary, in English

Abstract to be added

Publishing year

1997

Language

English

Document type

Licentiate thesis

Publisher

Uppsala universitet

Topic

  • Other Engineering and Technologies not elsewhere specified
  • Social Sciences Interdisciplinary

Status

Published

Supervisor

  • Claes Göran Granqvist