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High-rate reactive magnetron sputter deposition and characterization of metal oxide films

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Author

  • Maryam Olsson

Summary, in English

to be added

Publishing year

2000

Language

English

Document type

Dissertation

Publisher

Uppsala University

Topic

  • Other Engineering and Technologies not elsewhere specified
  • Social Sciences Interdisciplinary

Status

Published

Supervisor

  • Claes Göran Granqvist

ISBN/ISSN/Other

  • ISBN: 91-554-4683-3

Defence date

5 April 2000

Defence time

00:09

Defence place

Uppsala University, Ångström laboratory

Opponent

  • William Westwood (Consultant)