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Sloped side walls in SU-8 structures with ‘Step and Flash’

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Author

  • Maria Tenje
  • J. Hübner
  • A. Boisen

Publishing year

2005

Language

English

Document type

Conference paper

Topic

  • Medical Engineering

Conference name

31st International Conference on Micro and Nano Engineering (MNE 2005)

Conference date

2005-09-19 - 2005-09-22

Conference place

Vienna, Austria

Status

Published